SuperView W3
The SuperView W3 3D optical surface profilometer is an ideal instrument for sub-nanometer measurements of various precision parts. Based on the principle of white light interference technology, combined with a precision Z-direction scanning module and a 3D modeling algorithm, it scans the object's surface without contact and generates a 3D image of it.
After processing and analyzing the 3D image using XtremeVision software, a series of 2D and 3D parameters are obtained that reflect the surface quality of the object. The SuperView W3 is an easy-to-use precision optical instrument with powerful analysis functions for all types of surface shape and roughness parameters. Thanks to its unique light source, it can measure various precision parts with both smooth and rough surfaces.
- Standard field of view: 0.98 x 0.98 mm
- RMS roughness repeatability: 0.005 nm
- Scanning range: 10 mm
- Resolution: 0.1 nm
- Scenario measurement accuracy: 0.3%
- Repeatability of the stage measurement: 0.08% 1σ
Dedicated functions for the semiconductor field
- Measure the profile trenches after laser grooving in the cutting process.
- Measure the wafer film pitch height in a range of 1 nm to 1 mm.
- Measure the roughness of the cut silicon sheet after the polishing process and you can measure
- dozens of small areas to get the average value with one click.
- It supports measuring 6", 8", and 12" wafers and easily switches between 3 sizes.
- One-click vacuum mandrels automatically.
Applications
It is used for measuring and analyzing the surface roughness and profile of precision components in the semiconductor, 3C electronics, ultra-precision machining, optical machining, micro-nano materials and microelectromechanical systems industries.
Measurement and analysis of the surface shape and profile characteristics of various products, components and materials, such as flatness, roughness, waviness, appearance, surface defects, abrasion, corrosion, gaps, holes, stages, curvature, deformation, etc.
3C Electronics - Sapphire Crystal
| Features | . | .. | ... |
|---|---|---|---|
| Model No. | SuperView W3 | ||
| Size | 1000*900*1550 mm | ||
| Weight | 500 kilos | ||
| Light source | LED blanco | ||
| Video system | 1024×1024 | ||
| Objective lens | 10x (2.5x, 5x, 20x, 50x, 100x optional) | ||
| Optical zoom | 0.5x (0.75x, 1x, 0.375x optional) | ||
| Standard field of view | 0,98 × 0,98 mm | ||
| Lens turret | 5-hole motorized turret | ||
| XY object table | Size 450×450 mm | ||
| Travel range 300×300 mm | |||
| Load capacity 10 kilos | |||
| Control Method - Motorized | |||
| Tilt | ±5° motorized | ||
| Z-axis | Travel range 100 mm | ||
| Control Method - Motorized | |||
| Z-Stoke scan range | 10 mm | ||
| Resolution Z | 0,1 nm | ||
| RMS Roughness Repeatability | 0,005 nm | ||
| Measuring the height of the stage | Accuracy 0.3% | ||
| Repeatability 0.08% 1σ | |||
| Environmental requirement | |||
| 1 | Operating environment: No strong magnetic field | 4 | Ambient vibration: VC-C or better |
| 2 | Operating temperature: 0 °C ~ 30 °C fluctuation <2 °C/60 min | 5 | Compressed air: 0.6 MPa oil-free, water-free |
| 3 | Relative humidity: 5%~95% RH, non-condensing | 6 | Power: 300W |
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